Elastic behavior of anisotropic coatings sputter-deposited at oblique incidence
نویسندگان
چکیده
In this work, the elasticity constants of anisotropic thin films were determined using a model developed specifically in order to use Impulse Excitation Technique (IET). The is based on lamination theory and was validated with finite element analysis. IET used flexural torsional vibration modes determine Young's shear moduli coatings. behavior evaluated for titanium deposited by magnetron sputtering at Glancing Angle Deposition (GLAD) glass substrates silicon wafers. elastic response examined three different glancing angles presence in-plane anisotropy film noticed from measured constants. difference between conventional GLAD terms microstructure, texture evolution properties. influence porosity investigated. Nanoindentation measurements performed evaluate effect angle hardness reduced modulus. results revealed that mostly affected they decreased when increased. same Upon increasing angle, increased owing factors, among which non-standard columnar growth inclined crystallites toward vapor flux direction.
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ژورنال
عنوان ژورنال: International Journal of Mechanical Sciences
سال: 2021
ISSN: ['1879-2162', '0020-7403']
DOI: https://doi.org/10.1016/j.ijmecsci.2020.106050